发明名称 |
System for nano position sensing in scanning probe microscopes using an estimator |
摘要 |
In accordance with the invention, an estimator is used in the controller portion of a scanning probe microscope to provide precise position estimates of the probe tip which is controlled in the vertical direction by a microelectromechanical system (MEMS) actuator. The precise position estimates typically enhance the ability of the scanning probe microscope to follow the surface and typically provide improved measurements of the surface topography.
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申请公布号 |
US7607343(B2) |
申请公布日期 |
2009.10.27 |
申请号 |
US20060428176 |
申请日期 |
2006.06.30 |
申请人 |
AGILENT TECHNOLOGIES, INC. |
发明人 |
ABRAMOVITCH DANIEL Y |
分类号 |
G01B5/28;G01Q10/06;G01Q20/02 |
主分类号 |
G01B5/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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