| 摘要 |
PROBLEM TO BE SOLVED: To dispense with putting-in/out of a standard sample by manpower of an inspector, and to perform self-diagnosis of a solid imaging element inspection device using the standard sample, easily at an optional timing. SOLUTION: In solid imaging element inspection for inspecting a solid imaging element 11 by an inspection device 10, the solid imaging element measured beforehand in a prescribed measuring condition is placed on a prescribed spot 14a in the inspection device as the standard sample 19, and when performing self-diagnosis of the inspection device 10, the self-diagnosis is performed by measuring the standard sample 19 in the inspection device. Hereby, the self-diagnosis using the standard sample can be performed easily at an optional timing without requiring putting-in/out of the standard sample by man power of the inspector. COPYRIGHT: (C)2007,JPO&INPIT
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