| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an oxygen sensor element that is formed by integrating a heater section and a sensor section, where a heating element is buried into an alumina insulating layer, has improved durability and heat resistance, and improved stability for preventing crack generation and destruction even for long-term operation. <P>SOLUTION: The oxygen sensor element has a pair of electrodes on the inner wall surface of an atmosphere inlet and an outer surface that opposes the inner wall surface in a long, flat zirconia solid electrolyte substrate having the atmosphere inlet; and a heater section for burying the heating element into the alumina insulating layer. At the junction interface between the alumina insulating layer and the zirconia solid electrolyte, an 0.5-5.0 mol.% amorphous layer having 2-20 nm thick SiO<SB>2</SB>content is formed. Additionally, the alumina insulating layer preferably contains an alkaline earth metal by 1-10 percentage by mass in oxide conversion and Si by 0.02-0.2 percentage by mass in oxide conversion. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
