| 摘要 |
PURPOSE: The unit is provided to change the feeding speed of the feed arm; if the driving signal transmitted to the arm motor connected to the transmission arm which transfers wafers is constantly applied, the wafer or the feed arm is bumped into a certain part, the wafer is broken, or impurities due to shock disperse and become the source of pollution, which reduces the transference number. CONSTITUTION: The unit comprises a motor controller (20), a speed regulating part (22), a motor driving part (24), and an arm motor (26). The motor controller connects with the speed regulating part, which connects with the motor driving part, which connects with the arm motor. A step motor whose action varies according to a given stepping signal is used for the arm motor. If a signal controlling the motor driving is applied from the motor controller to the speed regulating part, one of 2 channels is selected according to the switching signal, and a control signal is applied to the motor driving part. Then the motor driving part applies a stepping signal to the arm motor, and the operation of the arm motor varies with the position of the transmission arm accordingly.
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