| 摘要 |
PROBLEM TO BE SOLVED: To prevent contact abrasion between a sucking path member and a rotary stage as well as the fluctuation of suction force, by arranging the sucking path member and rotary stage having a suction hole in a manner that they are not in contact with each other with a void therebetween. SOLUTION: A rotary stage 11 is provided with a rotary shaft 16 which is held freely rotatably on a frame 14 by a rolling bearing 15 and a suction hole 13 to suck a pellet 1 on a rotary central shaft thereof respectively. A belt 18 is wound around a pulley 17 fixed on the end of the rotary shaft 16 so as to give a rotating force thereto, and the quantity of rotation of a motor is controlled to adjust the rotary angular position of the rotary shaft 16. A sucking path member 21 screwed in the supporting bracket 14A of the frame 14 is inserted in a hollow part 16A which is provided on the rotary central shaft of the rotary shaft 16 in the rotary stage 11. A vacuum pressure supplied to a suction hole 21B of the sucking path member 21 is regulated by means of small void in the midway to the suction hole 13 of the rotary stage 11. Therefore, the leakage of vacuum pressure in the clearance between the sucking path member 21 and hollow part 16A can be eliminated. |
