摘要 |
PURPOSE:To prevent scratches on the surface of connector terminals during rubbing treatment. CONSTITUTION:Transparent electrodes 2 and connecting terminals 4 connected to the transparent electrodes 2 through lead wires 3 are formed on the top surface of a lower substrate 1. Then an orienting film 5 is formed on the whole plane of the substrate and subjected to rubbing treatment. In this process, since the connector terminals 4 are covered with the orienting film 5, no scratch is given to the surface of the connecting terminals 4. After an upper substrate is adhered to the lower substrate 1 with a sealing material, the orienting film 5 on the connector terminals 4 is removed by dry etching with oxygen plasma. |