发明名称 X-Y TABLE
摘要 <p>PURPOSE:To lessen the height of the whole in a coupling part by a method wherein at least either a fixed rail or a running rail is constructed of a pair of guide rails. CONSTITUTION:Guide rails 13 and 14 in two sets disposed above and below and guide rails 11 and 12 constructing a fixed rail 2 are coupled together through the intermediary of an air coupling 5 so that the former rails can run along the length direction of the guide rails 11 and 12. The air coupling 5 is provided integrally with a running rail 3 and compressed air is jetted from the air coupling 5 into spaces 4 and 6 toward the whole peripheral surface of each of the guide rails 11 and 12 so that the frictional resistance of the running rail 3 to the guide rails 11 and 12 be zero substantially, whereby the running rail is made to move precisely in the length direction of the guide rails 11 and 12. Since a load P in the direction of gravity and a load Q in the horizontal direction which act on a slider 7 can be borne by the top sides 11a and 12a and the lateral sides 11b and 12b of the guide rails 11 and 12 in a pair through the intermediary of the air coupling 5, the height (a) of the paired guide rails 11 and 12 can be made 1/2 of the height in the case when the fixed rail is constructed of one beam-shaped rail as usual.</p>
申请公布号 JPH05323059(A) 申请公布日期 1993.12.07
申请号 JP19920124657 申请日期 1992.05.18
申请人 ONODA CEMENT CO LTD 发明人 MATSUI KATSUMI;ISHII MINEO;MORISHITA NOBUAKI
分类号 B23Q1/00;G12B5/00;H01L21/027;H01L21/30;H01L21/68;(IPC1-7):G12B5/00;B23Q1/18 主分类号 B23Q1/00
代理机构 代理人
主权项
地址