APPARATUS AND METHOD FOR FABRICATING SEMICONDUCTOR TO EXTEND LIFETIME OF PUMP AND STABILIZE PRESSURE CONTROL OF PROCESS

摘要

PURPOSE: An apparatus for fabricating a semiconductor is provided to extend the lifetime of a pump and stabilize the pressure control of a process by easily eliminating the powder accumulated in a vacuum line without removing the vacuum line. CONSTITUTION: A thin film is deposited on a wafer in a process chamber(110) by a predetermined chemical reaction. The reaction gas in the process chamber is exhausted through a vacuum line(130). A pump is installed in the vacuum line. A cleaning unit(140) rapidly varies the pressure of the vacuum line to eliminate the powder accumulated inside the vacuum line.