发明名称 Electro-mechanical switching devices
摘要 A switching device includes an opening disposed in a substrate. A source is disposed adjacent the opening and has a contact surface parallel to sidewalls of the opening. A drain is disposed adjacent the opening and has a contact surface parallel to the sidewalls of the opening. A moveable gate stack includes a channel and a gate. The moveable gate stack is disposed within the opening.
申请公布号 US9608082(B2) 申请公布日期 2017.03.28
申请号 US201514788222 申请日期 2015.06.30
申请人 Infineon Technologies AG 发明人 Hutzler Michael
分类号 H01L29/66;H01L29/76;H01L31/062;G01P15/08;H01L29/423;B81B3/00;H01L27/088 主分类号 H01L29/66
代理机构 Slater Matsil, LLP 代理人 Slater Matsil, LLP
主权项 1. A switching device comprising: a first opening disposed in a substrate comprising a major surface, the first opening extending into the substrate along a first direction from the major surface; a first source disposed adjacent the first opening and having a contact surface parallel to sidewalls of the first opening; a first drain disposed adjacent the first opening and having a contact surface parallel to the sidewalls of the first opening; a dielectric layer disposed between the first source and the first drain, the dielectric layer isolating the first source from the first drain; and a first moveable gate stack comprising a first channel and a first gate disposed within the first opening, wherein the switching device comprises an ON state and an OFF state, and wherein, in the ON state, the switching device is configured to conduct a current parallel to the first direction.
地址 Neubiberg DE