| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film capacitor capable of achieving higher reliability and higher capacitance.SOLUTION: A thin film capacitor includes: a support substrate 110; a capacitance forming part 120 formed on the support substrate 110 and comprising a thin film electrode layer 121 and a thin film dielectric layer 122 which are laminated alternately; an intermediate electrode 140 electrically connected to the thin film electrode layer 121; a sealing member 150 to seal the capacitance forming part 120 and the intermediate electrode 140; and an external electrode 160 formed at least on a side surface of the sealing member 150. The external electrode 160 is electrically connected to the intermediate electrode 140 exposed from the sealing member 150.SELECTED DRAWING: Figure 1 |
