| 摘要 |
A turbo-molecular pump includes a base 3; a rotor 4 rotatably supported thereon; a stator 400 disposed around the rotor 4; and a tubular casing 2 configured to accommodate the stator 400. The stator 400 includes multiple stages of stator blades 43 and spacers 48 alternately stacked one upon another on a flange surface 31 of the base 3. At least one of the spacers 48 is provided with a circular ring part 483 continuously formed thereof covering the outer circumferential surface of other spacers 48 inside the casing 2.
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