发明名称 |
ATTUATORE ELETTROMAGNETICO INTEGRATO, IN PARTICOLARE MICRO-POMPA ELETTROMAGNETICA PER UN DISPOSITIVO MICROFLUIDICO BASATO SU TECNOLOGIA MEMS, E RELATIVO PROCEDIMENTO DI FABBRICAZIONE |
摘要 |
<p>An integrated electromagnetic actuator comprising: a first structural layer; a flexible membrane, extending over the first structural layer and comprising regions of ferromagnetic material; a chamber, delimited between the first structural layer and the flexible membrane; a winding, comprising a plurality of turns of conductive material and extending within the first structural layer; and a core element made of ferromagnetic material, extending within the first structural layer, inside the winding.</p> |
申请公布号 |
ITTO20100664(A1) |
申请公布日期 |
2012.01.31 |
申请号 |
IT2010TO00664 |
申请日期 |
2010.07.30 |
申请人 |
STMICROELECTRONICS S.R.L. |
发明人 |
FALLICA PIERO GIORGIO;GALATI CLELIA;RENNA LUCIO;SPINELLA NATALIA MARIA RITA |
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