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发明名称
METHOD FOR PERFORMING PHOTOLITHOGRAPHY USING BARCS HAVING GRADED OPTICAL PROPERTIES
摘要
申请公布号
EP2347304(A1)
申请公布日期
2011.07.27
申请号
EP20090741161
申请日期
2009.10.21
申请人
ADVANCED MICRO DEVICES, INC.
发明人
WALLOW, THOMAS, I.;KYE, JONGWOOK
分类号
G03F7/09
主分类号
G03F7/09
代理机构
代理人
主权项
地址
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