ELECTROSTATIC ACTUATOR, LIQUID DROPLET DELIVERING HEAD EQUIPPED WITH IT, LIQUID DROPLET DELIVERING APPARATUS AND DEVICE, AND METHOD FOR DRIVING LIQUID DROPLET DELIVERING HEAD

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic actuator capable of obtaining a large amount of displacement of an oscillating plate by a low electric voltage driving and using for a long period of time.

SOLUTION: In the electrostatic actuator, an insulating film 40 made to an electret is formed on either face of mutually opposing faces of an electrode 11 of an electrode substrate 2 and the oscillating plate 4, and the oscillating plate 4 is brought into contact with the electrode 11 of the electrode substrate 2 through the insulating film 40 by an attracting force generated by an electric field caused by the electret of the insulating film 40, and the oscillating plate 4 is separated from the electrode 11 by applying an electric voltage between the oscillating plate 4 and the electrode 11 of the electrode substrate 2 so that the electric field caused by the electret is offset. The electret is refreshed by applying an electric voltage for generating an electric field in the reverse direction to the electric field for separating the oscillating plate 4 from the electrode 11 of the electrode substrate 2 at a specified interval between the oscillating plate 4 and the electrode 11 of the electrode substrate 2.

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