| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical encoder which detects a two-dimensional relative displacement by a simple system. SOLUTION: The optical encoder is provided with a first scale 103 and a second scale 104 provided on one object and arranged with a certain gap so as to mutually cross with a periodic pattern, a first light emitting means 111 provided on another object for emitting first projection light to the first scale, a first condensing means 112 for condensing the first projection light on the first scale, a first light receiving means 113 for detecting light reflected by the first scale, a second light emitting means 121 for emitting second projection light to the second scale, a second condensing means 122 for condensing the second projection light on the second scale, and a second light receiving means 123 for detecting light reflected by the second scale. COPYRIGHT: (C)2004,JPO&NCIPI |
