Apparatus and method for image optimization of samples in a scanning electron microscope

摘要

A system and method for identifying an optimal landing energy of a probe current (16) in a scanning electron microscope system (10). A probe current (16) having a known landing energy is directed at a sample (24) for producing a signal electron beam (26). The current of the signal electron beam (26) is measured by directing the beam to a current detector (32) for calculating a current yield, which is the ratio of the signal current to the probe current. The landing energy can then be changed for subsequent measurements of the signal current to identify the landing energy which produces a desired current yield. Once identified, the landing energy value can be used to produce a signal electron beam (26) directed towards an imaging detector (28) to generate topographic images of samples. <IMAGE>