| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck having excellent withstand voltage characteristics. SOLUTION: The electrostatic chuck is provided with a substrate 1, a lower insulating layer 2 arranged on the surface of the substrate 1, a bonding layer 3 which is arranged between the substrate 1 and the layer 2 for fixing the layer 2 to the substrate 1, electrode layers 4a, 4b which are formed on the layer 2, and an upper insulating layer 5 formed on the layer 2 by thermal spraying to cover the foregoing. The substrate 1 is made of metal or a metal-ceramics composite material, and the layer 2 is constituted of a sintered body having a porosity of 1% or below. COPYRIGHT: (C)2004,JPO |
