| 摘要 |
PURPOSE: A flow rate control apparatus of a slurry supply system is provided to control correctly the amount of slurry and mix properly two or more kinds of slurries according to a desired ratio in a chemical mechanical process. CONSTITUTION: A plurality of branch lines(28,36) of a supply amount control portion(26) are branched from each circulation line(22,24). A plurality of flow rate control valves(32,40) are connected with a plurality of 3-way valves(30,38) in the supply amount control portion(26). The flow rate control valves(32,40) are connected with processing equipment(44) through a flow transducer(34,42). A deionized water supply line is connected with the 3-way valves(30,38) through an air valve(46). A clean dry air supply line is connected with the flow rate control valves(32,40) through ball valves(48,52) and regulators(50,54), respectively.
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