| 摘要 |
PROBLEM TO BE SOLVED: To provide a superior acceleration sensor which has a relatively simple structure, high performance and is low cost. SOLUTION: A capacitor comprises a fixed electrode 25, having an electrode surface 25a, a metal vibrator 27 which faces the electrode surface 25a with a prescribed interval in parallel and comprises a flat surface 27a, and an electret layer 23 formed on the electrode surface 25a of the electrode 25. A vibrator converter 20 is provided comprising a cylindrical case 21, which comprising a flange-like fitting part 21b at a lower end outer peripheral part, houses the capacitor, a circuit board 35 which comprises a flat surface provided with a prescribed conductive path, an FET 33 which is placed on the board 35 and connected electrically to the vibrator 27, and an insulator 31 for insulating the vibration plate 27 from the case 21. The board 35 is fixed to the fitting part 21b of the case 21 by its end part by spot welding, etc., so that the FET 33 is housed in the case 21.
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