Verfahren und Gerät zur Erzeugung hochauflösender optischer Bilder

摘要

A microscope interferometer is described, that scans an object surface through a membrane mask (2) with a multitude of pinholes (40). Light reflected back through the pinholes interferes with the darkfield image of the mask surface. The mask to object separation can be stabilized by an air flow (21) through the pinholes. Image processing techniques allow to overcome the Abbe diffraction limit for the lateral resolution.