发明名称 |
Coating Liquid for Forming Low Dielectric Constant Amorphous Silica-Based Coating Film and the Coating Film Obtained From the Same |
摘要 |
A coating liquid for forming a low dielectric constant amorphous silica-based coating film with a dielectric constant of 3.0 or below and a film strength (Young's modulus) of 3.0 GPa or more, and also having a smooth surface with an excellent hydrophobicity. The coating liquid contains (1) a silicon compound obtained by hydrolyzing bis(trialcoxysilyl)alkane (BTASA) and alcoxysilane (AS) in the presence of tetraalkylammoniumhydroxide (TAAOH), or (2) a silicon compound obtained by hydrolyzing bis(trialcoxysilyl)alkane (BTASA), alcoxysilane (AS) and tetraalkylorthosilicate (TAOS) in the presence of tetraalkylammoniumhydroxide (TAAOH).
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申请公布号 |
US2009025609(A1) |
申请公布日期 |
2009.01.29 |
申请号 |
US20060086745 |
申请日期 |
2006.12.15 |
申请人 |
EGAMI MIKI;ARAO HIROKI;NAKASHIMA AKIRA;KOMATSU MICHIO |
发明人 |
EGAMI MIKI;ARAO HIROKI;NAKASHIMA AKIRA;KOMATSU MICHIO |
分类号 |
C09D7/12;C07F7/18 |
主分类号 |
C09D7/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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