Method for cooling and dispersing a carrier gas, and method for vaporizing a carrier gas

摘要

Provided is a vaporizer that can efficiently cool a carrier gas, improve the effect of preventing a material from being clogged near the outlet port of a gas passage, contribute to prolonging the timing of maintenance and improving operating efficiency, and exert more uniform dispersing effect. A vaporizer includes: a center rod inserted into a carrier gas introduction hole formed in a disperser to form the gas passage in cooperation with the inner wall of the carrier gas introduction hole; a cooling part disposed on the outer circumferential side of the carrier gas introduction hole in the disperser to cool the inside of the gas passage; a cooling member insertion hole formed across almost the entire length of the center rod along the axial direction of the center rod; and a cooling member disposed in the inside of the cooling member insertion hole to cool the center rod.

主权项

1. A method for cooling and dispersing a carrier gas, comprising the steps of:
introducing a carrier gas having a plurality of thin film forming materials dispersed therein into a gas passage formed between an inner wall of a carrier gas introduction hole formed in a dispersing unit main body and a center rod inserted into the carrier gas introduction hole; and carrying the carrier gas having the thin film forming materials dispersed therein through the inside of the gas passage while cooling the carrier gas having the thin film forming materials dispersed therein using a cooling part disposed in the dispersing unit main body and a cooling member disposed in the center rod.