| 摘要 |
PROBLEM TO BE SOLVED: To provide a flaw inspection device capable of rapidly and accurately inspecting what process of a plurality of sample manufacturing processes a flaw or stain is caused in without relying on the discretion of a worker, and a flaw inspection method. SOLUTION: The flaw inspection device has a step for observing a sample using a multiwavelength microscopic apparatus 1 to display its observation image on an observation image display device 3, a step for collating the observation image displayed on the observation image display device 3 with the image based on the sample data of a memory device 4 by an image recognizing device 5, a step for detecting the flaw or the like of the sample by collating the observation image with the image based on the sample data and a step for judging what process of a plurality of the sample manufacturing processes a flaw or the like is caused in. COPYRIGHT: (C)2010,JPO&INPIT |
