| 摘要 |
Provided is a suction chuck simply configured with a compressed air supply path to each nozzle. The suction chuck is equipped with a flat planar main body having an opposite surface (31) facing the work. The main body comprises multiple suction factors spouting gas from the facing surface (31), a supply path supplying compressed air to each suction factor, and multiple exhaust holes passing through the main body in the thickness direction. Each suction factor comprises a cylindrical space (45) having a circular outlet (41) opening on the facing surface (31), and multiple nozzles (44) opening on the inner wall of the cylindrical space (45). The supply path comprises a distribution path (52) distributing compressed air to each nozzle (44), and a common supply path (47) supplying compressed air to the distribution path (52). And the suction member, the distribution path means (62) and the common supply path (47) are formed on different metal plates. |
