发明名称 SOLID-STATE IMAGE DEVICE, MANUFACTURING METHOD THEREOF, AND IMAGE CAPTURING APPARATUS
摘要 PURPOSE: A solid image taking apparatus and a method for manufacturing the same are provided to prevent the quality of an image from deteriorating due to noise by suppressing the generation of the noise due to a stress-liner film. CONSTITUTION: A photoelectric conversion unit(21) photoelectrically converts incident light to obtain a signal charge. A pixel transistor unit(14) outputs the signal charge from the photoelectric conversion unit. A peripheral circuit unit(15) is formed around a pixel unit(13) and includes the photoelectric conversion unit and the pixel transistor unit. A first stress-liner film has a compressive stress. A second stress-liner film has a tensile stress. The photoelectric conversion unit, the pixel transistor unit, and the peripheral circuit unit are arranged on a semiconductor substrate(11).
申请公布号 KR20100100618(A) 申请公布日期 2010.09.15
申请号 KR20100016542 申请日期 2010.02.24
申请人 SONY CORPORATION 发明人 TATESHITA YASUSHI
分类号 H01L27/146 主分类号 H01L27/146
代理机构 代理人
主权项
地址