| 摘要 |
<P>PROBLEM TO BE SOLVED: To remove a deposit on an optical element such as a radiating condenser of an aligner. <P>SOLUTION: In a method for cleaning a deposit of the radiating condenser; a collector assembly has a radiating condenser, a cover plate, and a support for connecting the radiating condenser to the cover plate. The cover plate is provided so as to cover the opening of a collector chamber 48. The opening may be large enough to allow the passage of the radiating condenser and the support. The radiating condenser is cleaned by different cleaning processing. This processing is performed by a cleaner. The cleaner may include a surrounding cover designed to form a storage capacity surrounding at least the radiating condenser, an inlet configured to supply at least one of cleaning gas and a cleaning solution to the storage capacity to clean at least the radiating condenser, and an outlet configured to remove at least one of the cleaning gas and the cleaning solution from the storage capacity. <P>COPYRIGHT: (C)2007,JPO&INPIT |
