,申请号JP19870124019-传众专利搜索

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发明名称
摘要
申请公布号	JP2522661(B2)	申请公布日期	1996.08.07
申请号	JP19870124019	申请日期	1987.05.22
申请人	NIPPON TELEGRAPH & TELEPHONE	发明人	TORII YASUHIRO;SHIMADA MASARU;WATANABE IWAO
分类号	H01L21/265;H01J27/16;H01J37/08;H01L21/31;H05H1/46;(IPC1-7):H01J27/16	主分类号	H01L21/265
代理机构		代理人
主权项
地址

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