| 摘要 |
A return line (20) for a probe station includes a sheet-like conductive strap (25) having a first end (52) connected electrically to a first probe (22) and a self-coiling second end (54) connected automatically detachably to a second probe (24), as by insertion of the second probe centrally within the coils of the second end (54). If the spacing between the probes (22,24) exceeds a maximum distance, the strap (25) harmlessly disconnects. The flat central portion of the strap (25) automatically tracks any reductions in the spacing between the probes, which enables fast probe travel and minimizes noise pickup. Preferably a spindle (104) rotatably engages the coiled probe (22) and has a post member (102) that carries the second end (54) of the strap to a far side of the probe to improve tip visibility and electrical connection during close-in probing. A process of making the strap (25) includes depositing layers of metal on a substrate using thin film technology. Self-coiling behavior of the strap is promoted by preheating the substrate (120) and by choosing, for one of the layers, a metal, thickness, and deposition process that will result in strong compressive forces acting internally in the layer. For ease of removal from the substrate, self-releasing behavior of the strap is promoted by providing an ultrasmooth substrate, a first layer material (128) that bonds weakly to the substrate but has a controllable thickness, and a second layer of material (132) that bonds variably to the substrate depending on the thickness of the first layer (128). <IMAGE> |
