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发明名称
DRY ETCHING METHOD
摘要
申请公布号
JPH05160086(A)
申请公布日期
1993.06.25
申请号
JP19910349847
申请日期
1991.12.10
申请人
RES DEV CORP OF JAPAN;NISHIZAWA JUNICHI;YAMAMOTO KENJI
发明人
NISHIZAWA JUNICHI;YAMAMOTO KENJI
分类号
H01L21/302;H01L21/203;H01L21/268;H01L21/306
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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