| 摘要 |
<p>A superconducting three terminal device is fabricated on a substrate (21), and comprises first and second output signal electrodes (22A and 22B) formed of a superconductor and provided on the major surface (21A) of the substrate at a spacing, the first and second output signal electrodes having respective side surfaces (22D and 22E), and a base electrode (22C) formed of a superconductor and provided on the first and second output signal electrodes so that ultra-small tunnel junctions (23A and 23B) takes place between the base electrode and the first and second output signal electrodes, the base electrode having a side surface (22F), in which the first and second output signal electrodes and the base electrode are grown in first, second and third directions respectively coincident with directions of thicknesses thereof and in which the side surfaces of the first and second output signal electrodes and the base electrode are substantially perpendicular to the first, second and third directions, respectively, wherein the side surfaces of the first and second output signal electrodes and the side surface of the base electrode are coplanar with respective virtual planes extending at respective finite angles with respect to the major surface of the substrate.</p> |
