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发明名称
FORMATION METHOD OF GLASS FILM
摘要
申请公布号
JPS5227363(A)
申请公布日期
1977.03.01
申请号
JP19750102976
申请日期
1975.08.27
申请人
HITACHI LTD
发明人
YAMADA KOUICHIROU;YAMADA KOUHEI;SUGAWARA KATSUO
分类号
H01L21/316;H01L21/31;H01L21/56
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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