Illumination system for extreme UV-projection exposure system used for projecting reflecting structures arranged on lower side in mask on photo resist, has solid body joint including three joint legs, which bend during deflecting rod

摘要

The system has a field-beveled mirror including individually adjustable mirror bevels (73) supported by a support plate and a fastening sleeve (98). Each bevel is fixedly connected with a fastening rod (106) so that each bevel is tilted around one of two orthogonal axes by deflecting the rod by an actuator. A solid body joint (96) is connected with the plate and the sleeve, and includes three joint legs (112) arranged around the rod. The legs are fastened at the sleeve and the bevels at respective ends or at a support element (104). The legs bend during deflecting the rod.