发明名称 |
Image forming method and charged particle beam apparatus |
摘要 |
An image forming method and a charged particle beam apparatus suitable for suppressing the inclination of charging when scanning a two-dimensional area with a charged particle beam. A third scanning line located between a first scanning line and a second scanning line is scanned. After the first, second and third scanning lines have been scanned, a plurality of scanning lines are scanned between the first and third scanning lines and between the second and third scanning lines. |
申请公布号 |
US8203504(B2) |
申请公布日期 |
2012.06.19 |
申请号 |
US20100907912 |
申请日期 |
2010.10.19 |
申请人 |
KOBARU ATSUSHI;MOROKUMA HIDETOSHI;KAWADA HIROKI;TAKAMI SHO;SASADA KATSUHIRO;YAMAMOTO KOUICHI;SATOU NORIO;NAKANISHI KUNIO;HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
KOBARU ATSUSHI;MOROKUMA HIDETOSHI;KAWADA HIROKI;TAKAMI SHO;SASADA KATSUHIRO;YAMAMOTO KOUICHI;SATOU NORIO;NAKANISHI KUNIO |
分类号 |
G09G1/08 |
主分类号 |
G09G1/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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