发明名称 Systems, methods and computer program products for determining contaminant concentrations in semiconductor materials
摘要 A method of analyzing a semiconductor sample is provided. According to one embodiment, the method includes measuring the diffusion length of minority carriers in the semiconductor sample. The resistivity of the semiconductor sample is measured. A heavy metal concentration in the semiconductor sample is determined based upon the diffusion length and resistivity of the semiconductor sample.
申请公布号 US2004010394(A1) 申请公布日期 2004.01.15
申请号 US20020195278 申请日期 2002.07.15
申请人 SEH AMERICA, INC. 发明人 KOVESHNIKOV SERGEI V.
分类号 G01R31/28;G06F15/00;(IPC1-7):G06F15/00 主分类号 G01R31/28
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