发明名称 |
Systems, methods and computer program products for determining contaminant concentrations in semiconductor materials |
摘要 |
A method of analyzing a semiconductor sample is provided. According to one embodiment, the method includes measuring the diffusion length of minority carriers in the semiconductor sample. The resistivity of the semiconductor sample is measured. A heavy metal concentration in the semiconductor sample is determined based upon the diffusion length and resistivity of the semiconductor sample.
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申请公布号 |
US2004010394(A1) |
申请公布日期 |
2004.01.15 |
申请号 |
US20020195278 |
申请日期 |
2002.07.15 |
申请人 |
SEH AMERICA, INC. |
发明人 |
KOVESHNIKOV SERGEI V. |
分类号 |
G01R31/28;G06F15/00;(IPC1-7):G06F15/00 |
主分类号 |
G01R31/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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