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发明名称
BAKING FURNACE
摘要
申请公布号
JPS6331118(A)
申请公布日期
1988.02.09
申请号
JP19860173600
申请日期
1986.07.25
申请人
OKI ELECTRIC IND CO LTD;MIYAZAKI OKI ELECTRIC CO LTD
发明人
KUWABARA TAKAYUKI
分类号
H01L21/027;H01L21/30
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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